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ANGO PVD μ-570c Flexible, modular PVD systems for high-quality R&D and pilot-scale production

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μ-570c systems have front-loading box-type chambers ideal for multiple-source magnetron sputtering but also thermal and e-beam evaporation.μ-570c  systems are glovebox-compatible for atmosphere-sensitive applications.μ-570c  systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity.

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