Glovebox-integrated μ-450c PVD systems
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For many applications, such as OLED, OPV and OTFT research, and graphene and 2D materials, samples are sensitive to oxygen and moisture and handling within inert environments is a must. In these cases, deposition tools must allow for transfer to and from glovebox enclosures with controlled inert atmospheres.
In addition to vacuum deposition, Moorfield can also equip glovebox-integrated tools with other hardware such as etching (including soft-etching) and annealing components.