Plasma-I Plasma Cleaner for R&D Labs
Specifications:
RF power: 1-200W continuously adjustable
Frequency: 13.56MHz
Quartz tube diameter: 150mm
Ultimate vacuum: 2pa
Gas path: 3 way
Pump power control: panel control
Video
Intro to plasma cleaning
I describe how to use plasma to create very clean surfaces on microscope slides. This process is used extensively in the semiconductor industry.
The video is from Youtube, if there is any infringement, we will delete it, please send an email to [email protected], thanks.