ANGO PVD μ-650c Flexible, modular PVD systems for high-quality R&D and pilot-scale production
ANGO PVD μ-650c systems are floor-standing vacuum evaporators for metal, dielectric and/or organics thin-film deposition. All systems contain a box-type stainless-steel chamber with a front door for loading/unloading. Large chamber volumes enable large sources for pilot-scale coating or multiple techniques for a flexible R&D tool. Systems are available fitted with all major deposition techniques and stages customised to specific substrates.
Turbomolecular pumping systems are standard, for high-vacuum base pressures of better than 5 × 10-7 mbar. Exact setup is extremely flexible and dependent on customer budget and applications.
Key features
- Modular design
- Front sliding door for in-glovebox loading
- Rear door for service access
- Turbomolecular or cryo-pumping systems
- Base pressures <5 × 10-7 mbar
- Metals, dielectrics and organics deposition
- Up to 11” diameter substrates
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- <Cleanroom compatible
ANGO PVD μ-650c Flexible, modular PVD systems for high-quality R&D and pilot-scale production
