ANGO PVD μ-650c Flexible, modular PVD systems for high-quality R&D and pilot-scale production
ANGO PVD μ-650c systems are floor-standing vacuum evaporators for metal, dielectric and/or organics thin-film deposition. All systems contain a box-type stainless-steel chamber with a front door for loading/unloading. Large chamber volumes enable large sources for pilot-scale coating or multiple techniques for a flexible R&D tool. Systems are available fitted with all major deposition techniques and stages customised to specific substrates.
Turbomolecular pumping systems are standard, for high-vacuum base pressures of better than 5 × 10-7 mbar. Exact setup is extremely flexible and dependent on customer budget and applications.