What is sputter yield?

The number of atoms ejected per incident ion (atoms/ion) is called the sputtering yield, Y. Sputtering yield is dependent on the following:

  • Energy of the incident ion
  • The incident angle
  • The surface binding energy of atoms in the target: for example lead (Pb) will have provide a much higher sputtering yield in comparison to titanium (Ti)
  • The masses of the ion and target atoms: momentum transfer is more efficient if the masses are similar.

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