The number of atoms ejected per incident ion (atoms/ion) is called the sputtering yield, Y. Sputtering yield is dependent on the following:
- Energy of the incident ion
- The incident angle
- The surface binding energy of atoms in the target: for example lead (Pb) will have provide a much higher sputtering yield in comparison to titanium (Ti)
- The masses of the ion and target atoms: momentum transfer is more efficient if the masses are similar.