Category: Vacuum Equipment
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What is sputter yield?
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The number of atoms ejected per incident ion (atoms/ion) is called the sputtering yield, Y. Sputtering yield is dependent on the following: Energy of the ...

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What is the best way to handle and store a cylindrical target?
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To avoid damage and contamination that could cause quality issues during the coating process, use simple precautions to store and handle cylidrical targets: ...

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How do I calculate my dynamic deposition rate?
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To determine your dynamic deposition rate, multiply the thickness of the coating you want to make in nanometers by the velocity of your substrate in meters per ...

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How many magnetrons do I need for my application?
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Each target material and coating process has limitations as to how fast the material can be deposited from each magnetron. Thus each different process has a ...

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How long should my target be?
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The length of the target tube is determined by the substrate length and the coating uniformity requirements. SCI refers to the overall length of the backing ...

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How do I connect to my SCI rotary magnetron?
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You will need to provide four types of connection to your SCI rotary (cylindrical) magnetron: Cooling water for SCI rotary magnetrons: Provided to the ...

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What is a large area substrate?
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Large area substrates are usually wide flat rigid panels (such as glass or plastic) or wide flexible webs (typically plastic or metal) that are coated as they ...

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What are the advantages of rotary (cylindrical) magnetrons over planar magnetrons?
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Cost Lower initial capital investment: The initial capital investment for rotaries is less than typical planar cathodes for 1.5 m systems and larger. ...

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What is RF sputtering
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Radio frequency (RF) sputtering is a type of SPUTTERING that is ideal for target materials that have insulating qualities. Like direct current (DC) sputtering, ...

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What is reactive sputtering?
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Reactive sputtering is a type of SPUTTERING where a target of one chemical composition (e.g. elemental Si) is sputtered in the presence of a gas or a mixture ...

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